Superlattice intrinsic layers of silicon thin-film solar cells
碩士 === 國立中興大學 === 光電工程研究所 === 105 === In this thesis, three series of intrinsic hydrogenated nanocrystalline silicon (nc-Si:H) films were fabricated by a pulse-wave modulated plasma-enhanced chemical vapor deposition (PECVD) system with different hydrogen dilution (R = H2/SiH4), plasma power (P), an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12040067480239355401 |