| Summary: | 碩士 === 國立中興大學 === 環境工程學系所 === 105 === TFT-LCD industry Ultra-pure water system is mainly used to provide the production of cleaning water, its importance is very high, in the process need to use a large number of high clean water to remove surface contaminants, especially the size of the panel with increasing demand, Water consumption and the cost of the cost also will increase, so how to effectively use the system operation is now very much need to pay attention to the subject.
This study is based on pure water system as the research object. Try to use the six standard deviation management approach DMAIC import improvement process, define the set goals, and use analytical techniques to identify possible factors, the results of the differences to assess and use Minitab analysis of the effectiveness of the target, to master the key changes, to achieve energy purpose.
Explore the content for the ultra-pure water system POLISHER processing unit with the motor power savings to explore the original operating conditions for the full-frequency operation, import improvement project to increase the frequency control, the unit power KPI process capability Cpk improved, successful verification This mode of operation can effectively achieve energy saving purposes.
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