| Summary: | 碩士 === 明志科技大學 === 材料工程系碩士班 === 105 === In this study, Vanadium dioxide (VO2) for thermochromic film was successfully prepared by High Power Impulse Magnetron Sputtering (HIPIMS). There were two main stages of the experiment. Firstly, The oxygen-argon ratio during sputtering of VxOy thin films were changed with 1, 2, 3, 4, 6, 8 and 10% on quartz substrate at annealing temperature of 350, 500, and 650℃. The optimum condition (6~8%) was obtained according to the optical and electrical properties. The second stage was coating titanium dioxide (TiO2) layer on the glass substrate by using conventional sputtering. The physical analyses include XRD, SEM, Raman spectroscopy, UV-vis-NIR and high temperature four point probe. The results of X-ray diffraction patterns show that the monoclinic phase (2θ = 27.8o) decreases with the increasing of oxygen-to-argon ratios (from 6 to 8%). The Raman spectra is consistent with the XRD patterns. The UV-Vis-NIR uses to measure the difference in transmittance and reflectance under high and low temperatures. The room temperature of 25℃ shows higher infrared light transmittance and the high temperature of 70℃ shows that the infrared light was blocked due to heat hardly transfered. With respect to the electrical property, the hysteresis loop by high temperature four point probe was measured. The results can prove that the films can effectively change the monoclinic phase of VO2 to the rutile phase of VO2 when the temperature is as high as 70℃. Thus, thermochromic properties were achieved by this work.
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