Fabrication and Characterization of VO2 Thermochromic Thin Films Prepared by High Power Impulsed Magnetron Sputtering
碩士 === 明志科技大學 === 材料工程系碩士班 === 105 === In this study, Vanadium dioxide (VO2) for thermochromic film was successfully prepared by High Power Impulse Magnetron Sputtering (HIPIMS). There were two main stages of the experiment. Firstly, The oxygen-argon ratio during sputtering of VxOy thin films were c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/4x8537 |