Applying Analytic Hierarchy Process(AHP) to Determine the Key Factors in Selecting Gas Detector for Semiconductor Manufacturing Factory

• Main Authors: TIEN,WEN-FENG, 田文鋒
• Other Authors: LIN, YU-HSIN
• Format: Others
• Language: zh-TW
• Published: 2018
• Online Access: http://ndltd.ncl.edu.tw/handle/e39c38

碩士 === 明新科技大學 === 管理研究所碩士在職專班 === 106 === In the semiconductor manufacturing process, a lot of hazardous gases and chemicals are used. That means that there is a risk of leaking and making workers be poisoned by contacting the gases and chemicals. Therefore, factories are usually equipped with relevant safety equipment, e.g. gas detectors, to prevent the leakage of toxic gases and chemical substances. And gas detectors can detect the concentration of gas in a short time. The Occupational Safety and Health Act regulate the rule of setting type of detectors. However it did not describe the position and the number of installed detector and the type of applied environment. The objective of this research is to determine the critical factors for selecting and evaluating gas detectors in semiconductor industry. This study adopts AHP to assess the selecting consideration for gas detectors. In the AHP model, four aspects, personnel safety, environmental impact, cost considerations, and detection effectiveness, are used to construct the assessment model. The results indicate that ‘personnel safety’ is the most critical factor should be considered in gas detecting sensor selection.