| Summary: | 碩士 === 龍華科技大學 === 機械工程系碩士班 === 105 === Nitride coatings (ZrWN, CrWN, TiAlN and TiN) promise manifold applications by improving the life and performance of machining components. Recently, nitride coatings have been widely used as hard coating applications such as drills and milling inserts because of their high hardness, wear resistance, and chemical stability.
In this study, various kinds of coatings of buffer layer (W or WN) and buffer /ZrWN composite multilayer have been fabricated by magnetron sputtering method. The optimal settings for the deposition parameters for buffer/ZrWN composite multilayer that are deposited on tungsten carbide tools and glass substrates using direct current (DCMS) reactive sputtering with pure Zr and W metal targets, and Ar plasma and N2 reactive gases. The effect of control factors (DC power, substrate bias, N2/(N2+Ar) flow rate and substrate temperature) on the deposition of buffer layer (W or WN), four factors, each at three levels, were considered. Dry turning of SKD 61steel tests was carried out using these coated tools. This study determined the effect of optimizing the deposition parameters for buffer/ZrWN composite multilayer on the structure, surface roughness and flank wear for the dry machining process. Base on grey-Taguchi method shows that the optimum conditions for good multiple performance characteristics for the buffer/ZrWN composite multilayer coated are given by the combination, which denotes DC power of 180 Watt, substrate bias of -100 V, N2/(N2+Ar) flow rate of 20%, and substrate temperature of 150oC.
In the study, the substrates were cleaned using a standard procedure that included a degreasing process and an acid treatment, and were then cleaned by oxygen plasma etching, in order to increase the adhesive strength of the buffer/ZrWN coatings. For comparison purposes, both DCMS and high-power impulse magnetron sputtering (HIPIMS)-grown buffer/ZrWN films were also studied.
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