| Summary: | 碩士 === 中華大學 === 科技管理學系 === 105 === Phenomenons of high-tech industry migration are increasing day by day. Shortening the time of new products to market and obtaining market opportunities can be regarded as the common goal of each industry. In the process of new technology or new process development, the key problems should be deal with are the process, preventions and improvements. Process Failure Mode and Effect Analysis (PFMEA) is designed to analyze the potential failure modes in production processes and to exploit the precautionary tools for prior failure problems, Furthermore, by using The Risk Priority Number (RPN),it can provide appropriate process improvement strategies and measures for high-risk potential problems.
And this research method has been commonly used in general manufacturing industry and electronics industry, but for the semiconductor process process there are less research, so in this study ,take Chrome black matrix (Chrome Black Matrix) shade film process for example, and then use the quality control program (Quality Control Plan) to start the process flow, by through expert questionnaire, the relevant process-rich areas of experts to carry out an objective data collection to complete the process failure mode and effect analysis, eventually, identify the key process risk.
In the case study, there are 26 cases of the risk index was investigated. The first five failure modes were as follows: too much transparencies, insufficient transmittance, deposited residual particles, out of spec of the residual rate and the average thickness of the film is above or below the specification. And then through the analysis of the characteristics of the map, build the improvement measures and re-evaluate the risk of improvement, the deduction to verify the results before and after the improvement. The five RPN value of the average reduction is 109.7, which is higher than expected of the improvement to be greater than 90. The results were significant and the key issues were improved. After the study, six improvement programs were put forward for the training and promotion of M companies and engineering staff.
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