Effects of Fe content on the magnetic properties and microstructure of Pr-Fe-B thin films
碩士 === 元智大學 === 化學工程與材料科學學系 === 104 === In this study, Si3N4(20 nm)/PrFeB+Fe(50-250 nm)/Si3N4(50 nm)/glass films with different Fe content are deposited by RF magnetron sputter using Pr25Fe65B10 alloy target and pure Fe chips. The effects of Fe content on magnetic properties and microstructures are...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55142096623036351687 |