Automatic in-site measurement system for thin film thickness

• Main Authors: Chen, Sin-Mao, 陳欣懋
• Other Authors: Wang,Yung-Cheng
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/02086547524983420429

碩士 === 國立雲林科技大學 === 機械工程系 === 104 === Plastic film has six manufacturing process: mixing, extrusion, molding, cooling, embossing and cutting. Extrusion process control of film thickness. If film thickness non-uniformity will affect the quality. Therefore, in this process a thin film thickness monitoring is necessary. Traditional film thickness measurement mode is the use of micrometer.This method will not record production history and will cause measurement error. Thus,this research use capacitive displacement sensor and eddy current displacement meter developed thickness measurement system and it can test thickness measurement system. This thickness measurement system can be used in the film thickness measurement and it also has two advantages of improving measurement error and achieving real-time measurement. In order to verify thickness measurement capability of the system, its repeatability has been analyzed. Precision of thickness measurement system is 0.008 mm and deviation is -0.006 mm. Precision of in-site thickness measurement system is 0.05 mm and deviation is -0.044 mm.