Non-focused Common-path Laser Encoder

• Main Authors: Yi-Hao Wu, 吳翊豪
• Other Authors: 吳乾埼
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/msd42b

碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 104 === Commonly usedcommon-path configuration.called (CPLE) has the advantages of high stability, high-resolution. ButCPLE almost is focused laser on grating.The focusedlaseron the grating is only about 100 mm in diameter. The optical scale is sensitive to grating manufacturing quality and grating dirty because of focused laser designed. This study proposes a non-focused common-path laser encoderdevice called (NFCPLE). NFCPLE can effectively overcome the problems in the past CPLE without focused laser design.NFCPLE compared with CPLE for the grating quality requirements is also much low.MoreoverIC-Haus LSCphotodetector reduces optical elements. With this technique, the effect of optical element error can be greatly reduced. In this study, NFCPLE conduct experimental evaluation of performance test and error analysis with HP5529A interferometer for offset evaluation, it is displayed in the analysis and the experimental results. In the displacement of 10 mm,the average differential of NFCPLE was 185.31nm with HP5529A interferometer. The time dependent drift of NFCPLE was measured for a period of three hour and was found to be 3.8 ± 0.5 nm with 1.6 ± 0.5 nm resolution. It is therefore shown that NFCPLE has enormous potential forfuture development.