The Fabrication of P-type and n-type Microstructured Ther moelectric Array
碩士 === 國立臺北科技大學 === 製造科技研究所 === 104 === In this study, first we tuned sputtering parameters to obtain the best thermoelectric properties of the film. And then, we used two methods which are lithography and shadow mask to fabricate thermoelectric microstructured devices. The first step, we used magne...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/k64b56 |