A Study in Developments of Hot Filament Chemical Vapor Deposition System for Diamond Films Growth Process
碩士 === 國立臺北科技大學 === 製造科技研究所 === 104 === The purpose of this thesis is to develop a home-made hot filament chemical vapor deposition (HFCVD) system for fabrication of diamond films on silicon and cobalt cemented tungsten carbide (WC-Co) substrates. Aiming at improvement of filament lifetime as well a...
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| Format: | Others |
| Online Access: | http://ndltd.ncl.edu.tw/handle/9ju559 |