Structure and surface properties of CFx-doped TaN thin films
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 104 === TaN thin film coatings are known to have good mechanical properties, impact toughness, as well as good biocompatibility. However, the friction coefficient of these films is sometimes too high, or the hemocompatibility is poor. The purpose of this study is t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/s27x6z |