Fabrication of irregular distributed metal particles for controlling the structure of shadow deposited nanohelices

• Main Authors: HSIAO, CHIH-YUNG, 蕭智勇
• Other Authors: 任貽均
• Format: Others
• Online Access: http://ndltd.ncl.edu.tw/handle/84y2nh

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 104 === In this research, ultra-thin silver and gold metal films with thicknesses from 5nm to 25nm are deposited and annealed after coating to develop irregular distributed seed layer. The influence of temperature of annealing and thickness of metal film on the size and density of metal particles are analyzed here. The average sized x and spacer y of silver and gold metal particles are (x, y) = (72.3 nm, 44.5 nm) and (x, y) = ( 183.5 nm, 137.7 nm) and (x, y) = (45 nm, 40 nm) and (x, y) = ( 200 nm, 170 nm) for dense and rare distribution, respectively. Furthermore, nanohelices are deposited upon the seed layer using glancing angle deposition. Nanohelices are deposited at a deposition angle of 83, 86,87ﾟand substrate spin rate of 0.0176 rpm and 0.0234 rpm with respect to the deposition rate of 0.3nm/s. The shadowing effect is offered by the seed layer and the average arm width of nanohelices is affected by the size of seeds. Compared with the average arm width of nanohelices on a smooth surface, smaller sized seeds would lead to thinner arm width and larger sized seeds would cause helices overlap with each other.