Transparent Conductive Oxide of Crack Filling Flexible Substrate Technology

• Main Authors: TSAI,DONG-HUN, 蔡東翰
• Other Authors: HSU,CHING-MING
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/685kg9

碩士 === 南臺科技大學 === 光電工程系 === 104 === Indium tin oxide (ITO) with good electro-optical properties has been widely used in display and touch panel nowadays. Currently substrates are still base on glass, but products will be lightweight, flexible and extremely high impact in the future, Therefore the flexible substrate will become the mainstream. In this study, that pre-cracked ITO to produce cracks by self-made bending me-chanical. When bending, individual bend radius 12mm, 10mm and 4mm repeatedly bent 1000 cycles. Then use the sputtering machine to deposited 20nm, 40nm and 60nm thickness in cracks. During deposited, administered flexible substrate a pre-strain. To investigate the above-described method whether helps ITO film to reply electrical and to increase the mechanical properties. Result showed that ITO substrate after flexing, the resistance will higher, even brock and can’t conductive. Crack Filling will reduce the resistance impedance has risen ITO. When the ITO film after the bending process, the resistance will not bend to a cer-tain bending radius has sharply increased the situation will be gradual rise. When re-peated bending, although not yet the same mechanical properties as the original PET/ITO. In 127μmPET / ITO presplit + 40nmITO its mechanical properties closest to the original ITO film.