A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process

• Main Authors: Wei-Ting Tseng, 曾偉庭
• Other Authors: 陳文瑞
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/375rd2

碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 104 === A procedure is A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process Since the global warming problem and other environmental issues. The industrial pollution problems hidden behind Taiwan Semiconductor industry , an important indicator of economic development, are more attention. Semiconductor manufacturing process using a lot of specialty gases. These gases are flammable, corrosive, strong oxidizing or toxic and must be handled properly. The manufacturing process is also widely using perfluorinated compounds (PFCs), these PFCs gases will affect human blood carry oxygen function, and its F-C, F-S and F-N molecular bonds have high infrared light absorption capability. The global warming potential (GWP) of PFC Gases are thousands to tens of thousands, so there are more international organizations control PFCs gas emissions, and the development of greenhouse gases reduction plan. (PFCs including NF3、SF6、CF4、C2F6、C3F8、C4F8 、CHF3..) Currently, combustion method is more mature technology to decompose PFCs gas. At present, natural gas (methane) is using as fuel to remove PFCs, but after gas combustion still generate carbon dioxide (CO2), one of the greenhouse gases . Methane is a flammable unstable gas ,related supply equipment and piping need high initial costs and management fees , such as insurance .So combustion method still has room for improvement. The purpose of this study, is searching for a way to reduce greenhouse gases produced about harmful gas treatment unit. Using electrolysis of water to produce hydrogen, electricity stops electrolysis, no gas accumulation causing safety problem, and high-temperature hydrogen flame to destroy and removal harmful gases. CF4 gas be chose as a representative, by using Fourier transform infrared spectroscopy (Fourier transform infrared spectroscopy, FTIR) measurements Inlet and Exhaust concentration of treatment unit. And changes in burner design, gas flow path and power of electrolysis machine , investigate the Decomposition and Removal Efficiency (DRE), and the impact of energy efficiency.