A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process

碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 104 === A procedure is A Study of Electrolysis of Water to Produce Hydrogen Flame Torch Applied to the Decomposition of the Tail Gas of Semiconductor Manufacturing Process Since the global warming problem and other environmental issues. The industrial pollutio...

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Bibliographic Details
Main Authors: Wei-Ting Tseng, 曾偉庭
Other Authors: 陳文瑞
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/375rd2