| Summary: | 碩士 === 國立聯合大學 === 機械工程學系碩士班 === 105 === Semiconductor and technology industry has rapidly developed in past years. In order to pursue high speed and high accuracy on the production, permanent-magnet linear motors are largely applied to semiconductor processing equipment and automation control. Traditional linear driving elements transform rotational motion into linear motion by matching rotation motors with belts, gears, or guide screws so that certain mechanical loss would appear in the mechanical energy delivery process, and the positioning accuracy presents certain error because of gap and slip on ball screws, belts, or gears. In the high-accuracy and high-speed application, traditional linear driving elements could no longer satisfy the demands.
A rod-type linear motor design process is proposed in this study. Theory analyses and finite element simulation software (JMAG-Designer) are used for designing an embedded rod-type linear motor to replace current systems driving screws with servo or step motors to generate the rectilinear motion.
Meanwhile, a rod-type linear motor is designed and produced to verify the performance difference between the simulation and actual products. The results are used as a correction parameter for future design.
|
|---|
