Development of silicon nanomembrane lift-off and transfer-maintain processes by supercritical fluid technology
碩士 === 國立高雄大學 === 電機工程學系碩士班 === 104 === Nowadays, as the application fields for wearable electronic devices is getting extended, people in silicon industry therefore pay more attention on developing silicon thin-film processes and related flexible devices. In comparing to polycrystalline silicon (po...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/62262216193532897334 |