Comprehensive Analysis of Interfacial Micro-Nano Structures in Triboelectric Layer of Triboelectric Energy Harvester

• Main Authors: Chih-Chieh Chuang, 莊智傑
• Other Authors: Ming-Han Liao
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/54910793433489380256

碩士 === 國立臺灣大學 === 機械工程學研究所 === 104 === In this thesis, we made the silicon substrate with the trench pyramid array on the surface by the ways of photolithography, dry etching, and wet etching. After the replica-modeling process, pyramid array structures could be formed on the interfacial layer of PDMS, which is referred as the triboelectric layer. Also, we used magnetron sputtering deposition to deposit Pt on the silicon substrates as the metal electrodes. With the combination of the triboelectric layer and the metal electrodes, the triboelectric energy harvester is complete. On the interface of PDMS, we produced three kinds of length of side, which are 10μm、15μm、20μm, in pyramid arrays, while the spacing of the second one is shortened to 5μm. The spacing of the rest is the same as the side. After the experimental measurement, we could know that the device with smaller size of pyramid has better open-circuit voltage than that with larger size of pyramid under the same pressure, which have not reached saturation pressure yet. On the other hand, under the same pressure condition, the device with shortened spacing has better open-circuit voltage than that with smaller size of pyramid. Therefore, TEH with larger size of pyramid arrays could not only remain great range of pressure sensing but also get better performance on open-circuit voltage by changing the spacing to smaller.