A Dual Probes AFM System with Effective Tilting Angles to Achieve High-Precision Scanning
碩士 === 國立臺灣大學 === 電機工程學研究所 === 104 === With the constant improvement of micro/nano-fabrication techniques, the measurement of feature size of micro/nano-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument that has been widely used...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00111380675152101985 |