Data Compression Ratio-aware Detailed Routing for Multiple E-Beam Direct Write Systems

• Main Authors: Yu-Hsiang Chiu, 邱煜翔
• Other Authors: 陳中平
• Format: Others
• Language: en_US
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/49819815702155267265

碩士 === 國立臺灣大學 === 電子工程學研究所 === 104 === The feature size of Integrated Circuits(IC) are shrinking down along with the advancement of technology, but the resolution of the ArF laser is far from the target for next generation lithography. Electron beam (E-beam) lithography, with its high-accuracy characteristic, is very likely to become the main role in next generation lithography. Because of the accuracy of E-beam, the exact information of the circuit has to be delivered to the E-beam emitter. However, circuits nowadays has become so complicated that the successfulness of this process relies on the speed of data transmission, which is not sufficiently fast even with technologies today. So in practice, data should be compressed first, transmitted by optic fibers, and then decompressed in the E-beam machines. In this thesis, we proposed a detailed routing method to improve data compression quality before applying the actual compression algorithm. The results of experiments show that, with one particular data compression algorithm, LineDiff Entropy, chosen, we improve data compression ratio with our proposed detailed router. And we can conclude that considering data compression ratio in physical design phase is a field worth studying.