Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape

Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape

博士 === 國立清華大學 === 動力機械工程學系 === 104 === 因申請專利緣故，資料延後公開

Bibliographic Details
Main Authors: Sheng–Feng Lin, 林聖峯
Other Authors: Cheng–Yao Lo
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/8ch67w
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spelling ndltd-TW-104NTHU53110662019-05-15T23:00:46Z http://ndltd.ncl.edu.tw/handle/8ch67w Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape 穿透切割膜檢驗晶圓切割道微隱裂隙之光學系統研究 Sheng–Feng Lin 林聖峯 博士 國立清華大學 動力機械工程學系 104 因申請專利緣故，資料延後公開 Cheng–Yao Lo Cheng–Huan Chen 羅丞曜 陳政寰 2016 學位論文 ; thesis 98 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 博士 === 國立清華大學 === 動力機械工程學系 === 104 === 因申請專利緣故，資料延後公開
author2 Cheng–Yao Lo
author_facet Cheng–Yao Lo
Sheng–Feng Lin
林聖峯
author Sheng–Feng Lin
林聖峯
spellingShingle Sheng–Feng Lin
林聖峯
Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape
author_sort Sheng–Feng Lin
title Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape
title_short Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape
title_full Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape
title_fullStr Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape
title_full_unstemmed Optical System for Inspecting Micro cracks in Silicon Wafer through Dicing Tape
title_sort optical system for inspecting micro cracks in silicon wafer through dicing tape
publishDate 2016
url http://ndltd.ncl.edu.tw/handle/8ch67w
work_keys_str_mv AT shengfenglin opticalsystemforinspectingmicrocracksinsiliconwaferthroughdicingtape
AT línshèngfēng opticalsystemforinspectingmicrocracksinsiliconwaferthroughdicingtape
AT shengfenglin chuāntòuqiègēmójiǎnyànjīngyuánqiègēdàowēiyǐnlièxìzhīguāngxuéxìtǒngyánjiū
AT línshèngfēng chuāntòuqiègēmójiǎnyànjīngyuánqiègēdàowēiyǐnlièxìzhīguāngxuéxìtǒngyánjiū
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