$Investigation of Interfacial Strains in Si0.8Ge0.2/Si Using Three-Beam Bragg-Surface Diffraction$

Investigation of Interfacial Strains in Si0.8Ge0.2/Si Using Three-Beam Bragg-Surface Diffraction

碩士 === 國立清華大學 === 物理系 === 104 === ABSTRACT Investigation of Interfacial Strains in Si0.8Ge0.2/Si Using Three-Beam Bragg-Surface Diffraction Yong-Cheng Wei, Advisor : Professor Shih-Lin Chang Master of Physics, National Tsing Hua University, Hsinchu, Taiwan In the manufactu...

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Bibliographic Details
Main Authors:	Wei, Yong Cheng, 魏永成
Other Authors:	Chang, Shih-Lin
Format:	Others
Language:	zh-TW
Published:	2016
Online Access:	http://ndltd.ncl.edu.tw/handle/18584782655571460266

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