Study of Transparent Conductive Zinc Oxide Thin Film on Plastic Substrates Deposited Cathodic Vacuum Arc Deposition System
博士 === 國立中山大學 === 機械與機電工程學系研究所 === 104 === This work investigated pure, conductivity and transparency zinc oxide (ZnO) thin films on the polymer substrates at a low temperature (< 75℃) by using cathodic vacuum arc deposition (CVAD) system. We reported the material, optical, electrical and mechani...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/wuvxq5 |