Study of Transparent Conductive Zinc Oxide Thin Film on Plastic Substrates Deposited Cathodic Vacuum Arc Deposition System

博士 === 國立中山大學 === 機械與機電工程學系研究所 === 104 === This work investigated pure, conductivity and transparency zinc oxide (ZnO) thin films on the polymer substrates at a low temperature (< 75℃) by using cathodic vacuum arc deposition (CVAD) system. We reported the material, optical, electrical and mechani...

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Bibliographic Details
Main Authors: Chien-Wei Huang, 黃健瑋
Other Authors: Ru-Yuan Yang
Format: Others
Language:en_US
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/wuvxq5