Development of Cr1-x-Six-based high resistivity thin-film resistors
碩士 === 國立中山大學 === 電機工程學系研究所 === 104 === In this study, high resistivity thin-film resistors using Cr1-x-Six-based materials were fabricated. To fabricate high resistivity thin-film resistors, the RF magnetron sputtering method for the growth of Cr1-x-Six thin films onto Al2O3 was adopted and the inf...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95809533762192377475 |