Fabrication of AlN thin film on LiTaO3 substrate and the application on SAW device

Fabrication of AlN thin film on LiTaO3 substrate and the application on SAW device

碩士 === 國立中山大學 === 電機工程學系研究所 === 104 === In this study, surface acoustic wave (SAW) devices were fabricated by aluminum nitride (AlN) thin films deposited on lithium tantalite (LiTaO3) substrates. The highly c-axis oriented AlN thin films could be obtained by controlling the sputtering parameters and...

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Bibliographic Details
Main Authors:	Shang-huai Lin, 林上懷
Other Authors:	Ying-Chung Chen
Format:	Others
Language:	zh-TW
Published:	2016
Online Access:	http://ndltd.ncl.edu.tw/handle/84456578927412834654

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