Impedance Analysis of TiO2/HfO2 Superlattices on c-Al2O3
碩士 === 國立中山大學 === 物理學系研究所 === 104 === This thesis is mainly researching on the impedance measurement and analysis of TiO2/HfO2 superlattices on c-sapphire substrate, equivalent circuit were proposed and simulated to acquire the dielectric properties of superlattices thin film. RF magnetron multi tar...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jhekks |