Epitaxial Growth of Zinc Oxide Nanomaterials on (0001)/(1-102) Sapphire Substrate by Chemical Vapor Deposition

• Main Authors: Wan-li Shih, 石萬里
• Other Authors: Ming-Chi Chou
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/81538102810568520643

碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 104 === In this research, ZnO nano-material grows on sapphire substrate by chemical vapor deposition and Vapor-Liquid-Solid (VLS) growth mechanism. Argon and oxygen are used as carrier gas and reaction gas respectively. Mixed powder of ZnO and graphite are used as reaction sources. Catalyst(Sapphire substrates) is coated by Au. After the reaction, we use scanning electron microscope, x-ray diffractometer, transmission electron microscope, photoluminescence spectroscope, cathodoluminescent and Raman spectroscope to analyze the characteristics of ZnO nano-materials. In the experiment, Under certain condition (reaction temperature is 950℃; reaction time is 10 minutes ; mixed gas flow of argon and oxygen is 50 sccm), I found that (0001)Sapphire grows uniformly and regularly in the direction of [0002]. Under the condition (reaction temperature is 960℃; reaction time is 10 minutes ; mixed gas flow of argon and oxygen is 50 sccm), I found well-emitted nano combs of ZnO on the (11 ̅02)Sapphire.