Micro Hot Plate of Gas Sensors

• Main Authors: Chienyeh Lin, 林建燁
• Other Authors: Chia-Yen Lee
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/55729795231675719255

碩士 === 國立屏東科技大學 === 車輛工程系所 === 104 === The goal of this study is to design and fabricate a Micro Temperature Control Systems of Gas Sensors.The design concept is to prepare a heater and a temperature sensor on a gas sensor substrate backside for reducing costs and increasing production efficiency. The gas sensor is formed on an alumina substrate. Pt thin film layer is deposited on the substrate backside to form resistors as a heater and a temperature sensor.There are four type heater geological designs to consider the heating characters and power consumption. The experiment results indicate that measurement sensitivity and TCR of PT resistor are determined as the parameters of the temperature control program to heat up or cool down the sensor rapidly and stably.