製程設備二氧化碳滅火系統性能探討
碩士 === 國立高雄第一科技大學 === 環境與安全衛生工程研究所 === 104 === The equipment used in TFT-LCD (Thin Film Transmitter Color Filter Liquid Crystal Display) industry is usually bigger than that in semiconductor industry. Many kinds of flammable and combustible chemicals, such as PGMEA, photo-resistant coating, acetone...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35948975601003906203 |