製程設備二氧化碳滅火系統性能探討

碩士 === 國立高雄第一科技大學 === 環境與安全衛生工程研究所 === 104 === The equipment used in TFT-LCD (Thin Film Transmitter Color Filter Liquid Crystal Display) industry is usually bigger than that in semiconductor industry. Many kinds of flammable and combustible chemicals, such as PGMEA, photo-resistant coating, acetone...

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Bibliographic Details
Main Authors: Min-Hui Huang, 黃閔暉
Other Authors: Kuang-Chung Tsai
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/35948975601003906203
Description
Summary:碩士 === 國立高雄第一科技大學 === 環境與安全衛生工程研究所 === 104 === The equipment used in TFT-LCD (Thin Film Transmitter Color Filter Liquid Crystal Display) industry is usually bigger than that in semiconductor industry. Many kinds of flammable and combustible chemicals, such as PGMEA, photo-resistant coating, acetone and acetic acid,are used in the TFT-LCD manufacturing process. Additionally, most fires occur in the wet bench from accident statistics. To achieve fire safety performance, insurance company usually requests the TFT-LCD industry to obey NFPA (National Fire Protection Association) codes besides national regulations, i.e. Standard for Installation of Fire Safety Equipments Based on Use and Occupancy. Therefore carbon dioxide fire extinguishers are usually installed when flammable or combustible materials are used. However, the company to sell the equipment and fire extinguishers may be different. The fire extinguishers may not be installed properly. This study consequently conducted risk assessment for those equipment with large amounts of flammable or combustible materials, and investigated whether the fire extinguishers were installed properly. A document was produced in this study to list the process and methods to check the installation of carbon dioxide fire extinguishers.