| Summary: | 碩士 === 國立中央大學 === 電機工程學系 === 104 === In this paper, we use Boomerang Chart that we published in the past to analyze the classified wafer maps in a great view, whether the distribution of defects uniform or not and verify it in mass production.
At first, we choose five kinds of size of wafers that we would like to analyze, and simulate basic curve according to these five kinds of size. In this experiment, we will create parameters NBD and NCD from every wafer in every data, and normalize the two parameters to create two new parameters, NNBD and NNCD. We will create Boomerang Chart according to the two parameters and compare with basic curve to observe every failure type’s position on basic curve, we will judge whether a wafer uniform or not and the situation of clustering of bad dice by this. Then, we will view whether there are systematic errors in non-classified data based on the result.
In this experiment, we verify mass production by using Boomerang Chart ,and find out the position and the situation of clustering of every failure type by observing Boomerang Chart ,and confirm the practicability of Boomerang Chart through non-classified data set to get the achievement of increasing yield、testing efficiency and reduce the production cost.
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