| Summary: | 碩士 === 國立交通大學 === 影像與生醫光電研究所 === 104 === There are lots of researches about capacitors. It is the main goal for everyone to achieve high effect on capacitors. So we apply magnetic materials into the process of the capacitor to cause carriers transport through built-in magnetic field, and we choose a high conductivity as electrodes. FePt is selected as magnetic material, and graphene is for electrodes.
There are three parts in this thesis. the first part is the design and fabrication of MIM structure. The second part are introductions of the magnetic annealing system and the method for built-in magnetic field. The third part investigates the effect by applying different magnetic fields and the properties of the MIM structure with graphene electrodes. After magnetic annealing, leakage current of devices decrease apparently. The larger magnetic field is applied, the lower leakage current is obtained. On the other hand, dielectric constants of devices actually increase by graphene electrodes, but leakage current also increase.
|
|---|
