| Summary: | 碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === In this thesis, we use the FPE structure developed by our group recently to fabricate the depletion-mode load inverters. The Vth of the FPE TFTs can be adjusted by varying the suspended bridge length. The major problem of the process is the undesirable suspended objects hang above the two sides of the bottom gate. One simple way to eliminate this issue is to reduce the height of the bottom gate. Effectiveness of this way is confirmed with the cross-sectional TEM images, and through the measured results, variation in device characteristics can also be greatly improved.
The effect of different oxide materials on the hysteresis phenomenon of the TFTs is also investigated and a model is adopted to explain the occurrence of the hysteresis. For the fabricated inverters, they have excellent switching performances and large swing ranges. Moreover, the voltage gain is about 111 at operation voltage of 9V. We also discuss the impact of characteristics of TFTs on the performances of inverters, and analyze the correlation between the VTC trends and device’s dimensions. Besides the static performances, dynamic properties of the inverters are also discussed, too.
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