Study on Electrolyte-Insulator-Semiconductor (EIS) Sensing Membranes with Microscale Structures
碩士 === 國立暨南國際大學 === 電機工程學系 === 105 === In this thesis, the Electrolyte-Insulator-Semiconductors with microscale structures were fabricated by inductively coupled plasma etching. In our results, the hysteresis of sensor was improved with the 50 nm SiO2 sensing membrane. The sensitivity, hysteresi...
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| Format: | Others |
| Language: | zh-TW |
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2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45hg9m |
| Summary: | 碩士 === 國立暨南國際大學 === 電機工程學系 === 105 === In this thesis, the Electrolyte-Insulator-Semiconductors with microscale structures were fabricated by inductively coupled plasma etching.
In our results, the hysteresis of sensor was improved with the 50 nm SiO2 sensing membrane. The sensitivity, hysteresis, and drift of EIS with the APTES/SiO2 stacked sensing membrane were all improved. Finally, with the micron-scale structures, the characteristics of sensors were all improved.
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