Study on IGZO Thin Film Transistors with Finlike Channels Fabricated by Nanoimprint Lithography
碩士 === 國立暨南國際大學 === 電機工程學系 === 105 === The research can divided by two parts, the first part is the experiment of sputtering, and the second one is about the nanoimprint lithography. As the result of first sputter deposition, the IGZO shows better performance in oxygen flow 5%, higher mobility and l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/mykac7 |