| Summary: | 碩士 === 國立成功大學 === 奈米積體電路工程碩士學位學程 === 104 === In this study, the high performances room temperature nitrogen dioxide (NO2) gas sensors were fabricated using zinc oxide-reduced graphene oxide (ZnO-rGO) composite films as sensing materials. The ZnO-rGO composite films were synthesized by annealing the zinc oxide-graphene oxide (ZnO-GO) composite films in Ar flow at 300℃ for 1 h which were prepared by spin-coating. Moreover, the ZnO-rGO composite films possessed several advantages, including easy fabrication and low cost. By varying the doping amount of ZnO, the response of gas sensors would be enhanced. According to the experimental results, the gas sensors using ZnO-rGO composite films which the weight ratio (ZnO/GO) was 0.08 as sensing materials exhibited the better NO2 sensing response at room temperature. The ZnO-rGO gas sensors (ZnO/GO=0.08) exhibited the sensing response of 45% under 100 ppm NO2 gas. Moreover, the ZnO-rGO gas sensors (ZnO/GO=0.08) which annealed in Ar flow at 300℃ for 2 h and 3 h possessed the gas response of 48% and 42% under 100 ppm NO2. The performances of the ZnO-rGO gas sensors (ZnO/GO=0.08) sensing different concentration of NO2 at room temperature not only had good linearly curve but also exhibited other advantages such as good response time, recovery time, and selectivity.
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