Robust Control Design Applied on X-Y Positioning Stage and Laser Emission Strategy

碩士 === 國立成功大學 === 機械工程學系 === 104 === This thesis is aimed at solving the problem of laser energy accumulation happened in the operating region of acceleration or deceleration during the process of X-Y laser positioning, and the countermeasure of the time-based synchronous design between servo motion...

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Bibliographic Details
Main Authors: Yen-MingLu, 盧彥名
Other Authors: Mi-Ching Tsai
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/16293871224061645382