The Study on Disaster Management of Chemical-Mechanical Planarization Process by Using AHP Methods

碩士 === 國立成功大學 === 工程管理碩士在職專班 === 104 === This research aims at decision evaluation on the disaster management of chemical-mechanical planarization process in Semiconductor Industry. The first step, this research established the AHP hierarchy model on the disaster source of chemical-mechanical planar...

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Bibliographic Details
Main Authors: Yi-HuanChen, 陳儀桓
Other Authors: Ming-Tien, Tsai
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/p4rjt9