| Summary: | 碩士 === 國立成功大學 === 工程管理碩士在職專班 === 104 === This research aims at decision evaluation on the disaster management of chemical-mechanical planarization process in Semiconductor Industry.
The first step, this research established the AHP hierarchy model on the disaster source of chemical-mechanical planarization process by using the literature review and interviews with experts. The second step, This research developed criterion and guidelines for decision-making by interview with experts that have relevant professional knowledge and practical experience - include CMP engineers, facility, equipment, environmental safety departments etc. This research determine the priority for each criterion and decision-making on the disaster management of chemical mechanical planarization process and provide the most appropriate approach on the disaster management.
This research investigate the most appropriate approach on the disaster management of chemical mechanical planarization process by qualitative analysis method (literature analysis, expert interviews and case studies) and quantitative methods (analytic hierarchy process, AHP). This study expect the results can not only reducing the disaster losses and personal injury to a minimum, but also achieve zero losses by disaster prevention.
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