| Summary: | 碩士 === 國立成功大學 === 土木工程學系 === 104 === This thesis studies a method of directly imprinting the polymeric material into a film by using the movement of the quartz and the glass substrate, and omitting the spin-coating process. The finite element analyses were carried out in ABAQUS to investigate the displacement control of the quartz and the glass substrate during the process of film formation, and the influence on the deformation of elastic mold, the resulting contact pressure and the deformation of polymeric material. The analyses were done by the axisymmetric model using the Lagrangian method, and the three-dimensional model utilizing the Coupled-Eulerian-Lagrangian (CEL) method respectively. The former mainly investigates the contact of the elastic mold controlled by the quartz and the substrate, neglecting the existence of polymeric materials. The latter probes the film formation of polymeric materials. The influence of the initial curvature of elastic mold controlled by the quartz, and the effects of the initial thickness, the radius and the properties of polymeric materials are also discussed. Referring the same positions of the quartz and glass substrate, the contact pressure of the elastic mold is independent of the moving method. The contact pressure of the elastic mold increases as the thickness of the polymeric material decreases. When the positions of the quartz are identical in the two models, the existence of polymeric materials would reduce the loads of the quartz. When the thickness of the polymeric material decreases, the discrepancies of the loads would reduce.
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