延伸式浮動閘極結構氧化鋅薄膜電晶體之 電漿/水溶液離子檢測及應用

碩士 === 國立勤益科技大學 === 電子工程系 === 104 === This study describes a simple and low-temperature annealing solution processing of sol-gel method for depositing zinc-oxide based thin film transistors (ZnO-based TFTs) of semiconductor channel layer. The effect of a plasma power with 18 W followed by low-temper...

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Bibliographic Details
Main Authors: Yong-Jhen Wu, 吳詠震
Other Authors: Hsin-ChiangYou
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/51515484542092125232