延伸式浮動閘極結構氧化鋅薄膜電晶體之 電漿/水溶液離子檢測及應用
碩士 === 國立勤益科技大學 === 電子工程系 === 104 === This study describes a simple and low-temperature annealing solution processing of sol-gel method for depositing zinc-oxide based thin film transistors (ZnO-based TFTs) of semiconductor channel layer. The effect of a plasma power with 18 W followed by low-temper...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
|
Online Access: | http://ndltd.ncl.edu.tw/handle/51515484542092125232 |