低成本雙軸MEMS加速度計開發與工具機切削振動監測的應用

• Main Authors: Jian-Hao Chen, 陳建豪
• Other Authors: Chih-Yung Huang
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/9v3m92

碩士 === 國立勤益科技大學 === 機械工程系 === 104 === With the trend of industry 4.0 and developing intelligent machine tools, the need for monitoring the vibration of accelerometers has increased. Accelerometers used for measuring vibration signals during milling processes require the characteristics of high sensitivity, high resolution, and high bandwidth. A commonly used accelerometer is the PZT type; however, integrating it into intelligent modules is excessively expensive and difficult. Therefore, the MEMS accelerometer is an alternative with the advantages of lower price and superior integration. In the present study, we integrated two MEMS accelerometer chips into low-pass filter and housing to develop a low-cost dual-axis accelerometer with a bandwidth of 5 kHz and a full scale range of ± 70 g for measuring machine tool vibration. In addition, a platform for measuring the linearity, cross-axis sensitivity and frequency response of the MEMS accelerometer by using the ISO-16063-21 back-to-back calibration method was also developed. Finally, cutting experiments with steady and chatter cutting were performed to verify the results of comparing the MEMS accelerometer with the PZT accelerometer in the time and frequency domains. The results demonstrated that the dual-axis MEMS accelerometer is suitable for monitoring the vibration of machine tools at low cost.