An Anomaly Detection Method for Fluorine Discharge in Semiconductor Tools
碩士 === 國立中興大學 === 資訊科學與工程學系 === 104 === As the environmental awareness has increased in the society, environmental issues become more important for enterprise social responsibility. In semiconductor industries, the efficient treatment of exhaust gas, especially Fluorine discharge F2, produced by mac...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34928553570818134187 |