Detection of additives in copper etching liquid using electrochemical amperometry with disposable gold electrode

碩士 === 國立中興大學 === 機械工程學系所 === 104 === Copper etching process is one of the most important process in panel industry. Appropriate copper etching not only lower the defect rate, but also improve the product quality. The concentrations of hydrogen peroxide and a variety of additives in copper etchant a...

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Bibliographic Details
Main Authors: Yu-Bin Zhang, 張鈺斌
Other Authors: 吳嘉哲
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/76396476577420913205