FePt media with MoC/MgXO (X=Cu,Co,Ni) and TiOC /MoC combined intermediate layer

• Main Authors: Jay-Lin Tseng, 曾傑琳
• Other Authors: Jai-Lin Tsai 蔡佳霖
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/98264262549841026834

碩士 === 國立中興大學 === 材料科學與工程學系所 === 104 === We used a DC magnetron sputtering system in the study. The experiment was divided into two parts. In the first part, we deposited (Mg0.2Cu0.8)O, (Mg0.4Co0.6)O and ( Mg0.4Ni0.6)O on Cr0.78Ru0.22 alloy on heated substrate , and then sequentially deposited Mo40C60 and FePt. Let the underlying purpose of CrRu (200) peak intensity increased , FWHM angle decreased and improved vertical anisotropy of magnetic properties. The second part , TiC (60at%) - TiO (40at%) was deposited on Mo0.4C0.6 intermediate layer and then deposited on FePt. The aims to improve the interface energy between the FePt and Mo0.4C0.6 energy relationships, thereby improving island film structure. The first part was fixed FePt(10 nm)/Mo40C60(25 nm)/MgXO(5 nm)/CrRu(80 nm) of the film. The lattice constant of oxide (Mg0.2Cu0.8) O, (Mg0.4Co0.6)O and (Mg0.4Ni0.6)O thin film matched with Mo0.4C0.6 and CrRu film. Using Mo0.4C0.6/ (Mg0.2Cu0.8)O combined intermediate layers, the rocking width of FePt (001) and CrRu (200) diffraction peak were changed from 7.1o to 6.1o, and 5.7o to 3.8o, respectively. For MoC/MgCoO dual intermediate layers, the rocking width of FePt (001) and CrRu (200) diffraction peak were 6.7o and 4.1o. The FePt/ Mo0.4C0.6/(Mg0.4Co0.6)O film illustrates perpendicular magnetic anisotropy with out-of plane coercivity of 9.3 kOe which is higher than FePt film deposited on MoC layer (8.5 kOe) and the in-plane loops is linear. The second part was fixed FePt(10 nm)/TiO0.4C0.6(t nm) /Mo40C60(25 nm)/Cr0.78Ru0.22(80 nm)).The thin TiOC layer with smaller surface energy and lattice constant than MoC was inserted to modify the magnetic properties and microstructure of FePt films. Using TiOC/MoC combined intermediate layer, the rocking width of FePt (001) diffraction peak was changed from 7.1o to 6.2o, indicating that TiOC could achieve better epitaxial growth due to smaller lattice mismatch. It also illustrated perpendicular magnetic anisotropy with out-of plane coercivity of 11 kOe which is higher than FePt film deposited on MoC layer (8.5 kOe). For microstructure, the FePt grains size was further reduced with average grains of 4.7 nm.