Optimization of the Thin Film Thickness for MEMS Pressure Sensor Using Taguchi Methods
碩士 === 明新科技大學 === 機械工程系精密機電工程碩士在職專班 === 103 === With the rising road safety awareness, tire pressure detection using MEMS pressure sensor becomes more and more popular. The thin film technology MEMS pressure sensor could adapt in bad environments including high-temperature and corrosive conditions....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87913356566223019836 |