Study and Fabrication of Zn2SnO4 Dielectric Thin Films by RF Magnetron Sputter
碩士 === 龍華科技大學 === 電子工程系碩士班 === 104 === Zn2SnO4(ZS) thin films were deposited on p-type Si(100) substrate by RF magnetron sputter in this study. The effects of RF power, working pressure, deposition temperature and annealing temperature on ZS dielectric property and physical property have been eval...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37400511605563711547 |