Research on Integrated Circuit Manufacturing Process Thermostatic Control System

Research on Integrated Circuit Manufacturing Process Thermostatic Control System

碩士 === 崑山科技大學 === 電子工程研究所 === 104 === In this paper, we research on thermostatic control system of integrated circuit manufacturing process. The thermostatic control system is mainly applied to semiconductor etching process, it includes the refrigerant system and thermostatic control system. Thermos...

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Main Authors: LIN,KUAN-HSIEN, 林冠憲
Other Authors: CHEN,YAW-HWANG
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/33286880553700150167
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spelling ndltd-TW-104KSUT06860082017-11-12T04:38:45Z http://ndltd.ncl.edu.tw/handle/33286880553700150167 Research on Integrated Circuit Manufacturing Process Thermostatic Control System 半導體製程恆溫控制系統的研究 LIN,KUAN-HSIEN 林冠憲 碩士 崑山科技大學 電子工程研究所 104 In this paper, we research on thermostatic control system of integrated circuit manufacturing process. The thermostatic control system is mainly applied to semiconductor etching process, it includes the refrigerant system and thermostatic control system. Thermostatic control system which used PID and PLC controls refrigerant system to achieve thermostatic balance state of cooling Coolant. We use electric circuit board add in singal to simulate the problems of thermostatic control system and use Arduino microprocessor to simulate temperature diversification. CHEN,YAW-HWANG 陳耀煌 2016 學位論文 ; thesis 46 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 崑山科技大學 === 電子工程研究所 === 104 === In this paper, we research on thermostatic control system of integrated circuit manufacturing process. The thermostatic control system is mainly applied to semiconductor etching process, it includes the refrigerant system and thermostatic control system. Thermostatic control system which used PID and PLC controls refrigerant system to achieve thermostatic balance state of cooling Coolant. We use electric circuit board add in singal to simulate the problems of thermostatic control system and use Arduino microprocessor to simulate temperature diversification.
author2 CHEN,YAW-HWANG
author_facet CHEN,YAW-HWANG
LIN,KUAN-HSIEN
林冠憲
author LIN,KUAN-HSIEN
林冠憲
spellingShingle LIN,KUAN-HSIEN
林冠憲
Research on Integrated Circuit Manufacturing Process Thermostatic Control System
author_sort LIN,KUAN-HSIEN
title Research on Integrated Circuit Manufacturing Process Thermostatic Control System
title_short Research on Integrated Circuit Manufacturing Process Thermostatic Control System
title_full Research on Integrated Circuit Manufacturing Process Thermostatic Control System
title_fullStr Research on Integrated Circuit Manufacturing Process Thermostatic Control System
title_full_unstemmed Research on Integrated Circuit Manufacturing Process Thermostatic Control System
title_sort research on integrated circuit manufacturing process thermostatic control system
publishDate 2016
url http://ndltd.ncl.edu.tw/handle/33286880553700150167
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AT línguānxiàn researchonintegratedcircuitmanufacturingprocessthermostaticcontrolsystem
AT linkuanhsien bàndǎotǐzhìchénghéngwēnkòngzhìxìtǒngdeyánjiū
AT línguānxiàn bàndǎotǐzhìchénghéngwēnkòngzhìxìtǒngdeyánjiū
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